Engineering researchers develop deep-UV microLED display chips for maskless photolithography

In a breakthrough set to revolutionize the semiconductor industry, engineers have developed the world’s first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density, enabling exposure of photoresist films in a shorter time.
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